diff --git a/eng/native/functions.cmake b/eng/native/functions.cmake
index 9c2cc0c7dee2bf..f39fb67bd0cf53 100644
--- a/eng/native/functions.cmake
+++ b/eng/native/functions.cmake
@@ -468,9 +468,12 @@ function(generate_module_index Target ModuleIndexFile)
         set(scriptExt ".sh")
     endif()
 
+    set(index_timestamp ${CMAKE_CURRENT_BINARY_DIR}/${CMAKE_CFG_INTDIR}/${Target}_index.timestamp)
+
     add_custom_command(
-        OUTPUT ${ModuleIndexFile}
+        OUTPUT ${index_timestamp}
         COMMAND ${CLR_ENG_NATIVE_DIR}/genmoduleindex${scriptExt} $<TARGET_FILE:${Target}> ${ModuleIndexFile}
+        COMMAND ${CMAKE_COMMAND} -E touch ${index_timestamp}
         DEPENDS ${Target}
         COMMENT "Generating ${Target} module index file -> ${ModuleIndexFile}"
     )
@@ -482,7 +485,7 @@ function(generate_module_index Target ModuleIndexFile)
 
     add_custom_target(
         ${Target}_module_index_header
-        DEPENDS ${ModuleIndexFile}
+        DEPENDS ${index_timestamp}
     )
 endfunction(generate_module_index)
 
diff --git a/src/coreclr/vm/eventing/CMakeLists.txt b/src/coreclr/vm/eventing/CMakeLists.txt
index fccfa86aef3bac..1e27a3c0693428 100644
--- a/src/coreclr/vm/eventing/CMakeLists.txt
+++ b/src/coreclr/vm/eventing/CMakeLists.txt
@@ -24,14 +24,17 @@ endif()
 
 set(GENEVENTING_SCRIPT ${CLR_DIR}/scripts/genEventing.py)
 
-add_custom_target(eventing_headers
-  ${PYTHON_EXECUTABLE} ${GENEVENTING_SCRIPT} --man ${EVENT_MANIFEST} --inc ${GENERATED_INCLUDE_DIR} --dummy ${GENERATED_INCLUDE_DIR}/etmdummy.h ${NONEXTERN_ARG} ${NOXPLATHEADER_ARG}
+add_custom_command(
+  OUTPUT ${CMAKE_CURRENT_BINARY_DIR}/${CMAKE_CFG_INTDIR}/eventing_headers.timestamp
+  COMMAND ${PYTHON_EXECUTABLE} ${GENEVENTING_SCRIPT} --man ${EVENT_MANIFEST} --inc ${GENERATED_INCLUDE_DIR} --dummy ${GENERATED_INCLUDE_DIR}/etmdummy.h ${NONEXTERN_ARG} ${NOXPLATHEADER_ARG}
+  COMMAND ${CMAKE_COMMAND} -E touch ${CMAKE_CURRENT_BINARY_DIR}/${CMAKE_CFG_INTDIR}/eventing_headers.timestamp
   DEPENDS ${EVENT_MANIFEST} ${GENEVENTING_SCRIPT}
   VERBATIM
 )
 
 set_source_files_properties(${EventingHeaders} PROPERTIES GENERATED TRUE)
 
+add_custom_target(eventing_headers DEPENDS ${CMAKE_CURRENT_BINARY_DIR}/${CMAKE_CFG_INTDIR}/eventing_headers.timestamp)
 add_dependencies(eventing_headers eventprovider)
 
 add_subdirectory(eventpipe)
diff --git a/src/coreclr/vm/eventing/EtwProvider/CMakeLists.txt b/src/coreclr/vm/eventing/EtwProvider/CMakeLists.txt
index 6545b03117e5fc..3bc2b8c675e5eb 100644
--- a/src/coreclr/vm/eventing/EtwProvider/CMakeLists.txt
+++ b/src/coreclr/vm/eventing/EtwProvider/CMakeLists.txt
@@ -13,6 +13,10 @@ set (ETW_PROVIDER_OUTPUTS
 
 set_source_files_properties(${ETW_PROVIDER_OUTPUTS} PROPERTIES GENERATED TRUE)
 
-add_custom_target(eventprovider
-  ${PYTHON_EXECUTABLE} ${ETW_PROVIDER_SCRIPT} --man ${EVENT_MANIFEST} --exc ${EVENT_EXCLUSIONS} --intermediate ${GENERATED_INCLUDE_DIR}
+add_custom_command(
+  OUTPUT ${CMAKE_CURRENT_BINARY_DIR}/${CMAKE_CFG_INTDIR}/eventprovider.timestamp
+  COMMAND ${PYTHON_EXECUTABLE} ${ETW_PROVIDER_SCRIPT} --man ${EVENT_MANIFEST} --exc ${EVENT_EXCLUSIONS} --intermediate ${GENERATED_INCLUDE_DIR}
+  COMMAND ${CMAKE_COMMAND} -E touch ${CMAKE_CURRENT_BINARY_DIR}/${CMAKE_CFG_INTDIR}/eventprovider.timestamp
   DEPENDS ${EVENT_MANIFEST} ${EVENT_EXCLUSIONS} ${ETW_PROVIDER_SCRIPT})
+
+add_custom_target(eventprovider DEPENDS ${CMAKE_CURRENT_BINARY_DIR}/${CMAKE_CFG_INTDIR}/eventprovider.timestamp)